报 告 题 目:Latest Developments in SPM Spatial Resolution and Physical Property Measurement
报 告 人:Dr Wanxin SUN, Bruker公司
时 间:2017年9月13日(周三)下午3:00
地 点:南楼2层会议室
邀 请 人:裘晓辉 研究员(Tel:82545583)
报告摘要:
Atomic Force Microscopy (AFM) has been extensively used in Nanomaterial and Nanodevice characterization. However, as a microscope, its spatial resolution is limited by the finite size of probe. In physical property measurement, the data repeatability and reproducibility are not good enough for today’s research and development work, especially in semiconductor and data storage process control.
In this report, we will discuss the physics and approaches on how to improve spatial resolution of AFM in different environments. In physical property measurements, we will discuss how to make mechanical and electric property measurement quantitative.
报告人简介:
Dr Wanxin SUN holds a PhD degree in Physics, M.Eng. and B.Eng. degrees in precision metrology and instrumentation. During his research career as PhD candidate and post-doctoral fellow, he worked on near-field optics and near-field spectroscopy for Nanomaterial and Nanodevice characterization in National University of Singapore. After that, he migrated to Institute of Bioengineering and Nanotechnology, where he devoted himself into imaging based bioinformatics, including developing non-linear optical microscopy and scanning probe microscopy for tissue dynamics study. He has developed several microscopic techniques, published more than 40 papers in international journals, and has been an inventor of several US patents. He was also invited to present on international conferences more than 30 times.
After he joined Bruker Nano Surface division, he leads a team of application scientists working on quantitative physical properties characterization at nanometer scale.